
DISPLAY
We realize customer satisfaction through customized layout design in close collaboration with our clients.

Ass'y

LIFT Conveyor

EUV Conveyor

Tilting Conveyor

Reverse Conveyor

Shuttle Conveyor

Crack Inspector

Shuttle Stage

Clean Booth
8.6G FMM Mask Cleaner System

Initial Inspection Unit at Mask Cleaner Inlet

Mask Transfer Robot

Mask CST LD / ULD

FMM Mask Discharge Port

Gantry Robot System